AFM探针描述
适用的Sample:
Semiconductors
适用的AFM机型:
Insight
适用的Work Mode:
Critical Dimension (CD) AFM,Deep Trench (DT)
适用的Application:
Holes/ Trenches
Coating 描述
| cantilever Back side coating | Reflective Aluminum |
|---|---|
| tip coating | -- |
Tip 规格
| tip geometry | Critical Dimension (Overhang) |
|---|---|
| tip radius (Nom) | 50nm |
| tip height | 10-15um |
| Overhang | 5-10nm |
| Effective Length | 200-250nm |
| Vertical Edge Height | <15nm |
Cantilever 规格
| cantilever geometry | Rectangular |
|---|---|
| K(Nom) | 40N/m |
| Frequency(Nom) | 300KHz |
| length(Nom) | 125um |
| thickness(Nom) | 3.75um |
| cantilever material | 0.01 - 0.025 Ωcm Antimony (n) doped Si |
| top layer back | 40 ±10 nm of Al |
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Frequency
Nom:
70KHz
Spring Const.
Nom:
2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
