CDR130C
  • Manufacturer: Bruker
  • Cantilever Coating: B: Reflective Aluminum,F: Wear resistant carbon
  • Tip Geometry: Critical Dimension (Overhang)
  • Number of Cantilevers: 1个悬臂
    F350KHz K35N/m L125um
AFM探针描述

适用的Sample:

适用的AFM机型:
Insight

适用的Work Mode:
Critical Dimension (CD) AFM

适用的Application:
Holes/ Trenches

Coating 描述
cantilever Front side coating
cantilever Back side coating Reflective Aluminum
tip coating Carbon Coated
Tip 规格
tip geometry Critical Dimension (Overhang)
tip radius (Nom) --
tip height 14-16um
Front Angle (FA) 15 ±5°
Back Angle (BA) 15±5°
Side Angle (SA) 15±5°
Overhang 13-25nm
Effective Lenath 700-900nm
Tip Width 110-140nm
Vertical Edge Height < 15nm
Cantilever 规格
cantilever geometry Rectangular
K(Nom) 35N/m
Frequency(Nom) 350KHz
length(Nom) 125um
thickness(Nom) 4um
cantilever material 0.010 - 0.025 Ωcm Silicon
top layer back 40 ±10 nm of Al
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Frequency
Nom: 70KHz
Spring Const.
Nom: 2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom: 300KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom: 300KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom: 70KHz
Spring Const.
Nom: 2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
探针对比
探针型号对比
开始对比 最多4个
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